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Using the fill tool
I have created a mask consisting of evenly spaced rectangles. These structures are to be fully exposed in e-beam lithography, so I need to fill them. I understand that using the layer toolbox to assign some "stipple" is only for visualization and does not actually do any filling?
Do I need to use the fill tool in Utilities? How do I use it? I keep getting an error message saying "no valid layer selected to get fill cell's bounding box from"
Please try to explain simply, as I've only recently started using Klayout :)
Do I need to use the fill tool in Utilities? How do I use it? I keep getting an error message saying "no valid layer selected to get fill cell's bounding box from"
Please try to explain simply, as I've only recently started using Klayout :)
Comments
Hi,
are you familiar with mask layout procedures in general?
Basically, every polygon (box, path ...) is "filled" on a mask. The stipple is only provided for visualization - if multiple layers are overlapping the stipple pattern helps to distinguish them.
The "fill tool" has an entirely different scope. It is used to create dummy shapes (filled ones) in order to equalize the pattern density. The background is that certain processes (etching, CMP etc.) give better results if the average density of the pattern is similar on the mask. Hence the fill tool can be used to put dummy shapes into the empty regions so the density is increased there leading to a more uniform density pattern.
Matthias