mad_drummer
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- mad_drummer
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Hi @Matthias, In this case I am the "manufacturer" working on Raith tools :) And yes, everytime I have to make less or more prework on every pattern to have it patterned in a proper way. Unfortunately, mostly it is not more to different f…
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@dick_freebird Looks like generally you're right, but fortunately not as deep :smile: As far as I know for e-beam tool specific features, such as raster kind of exposure, beam sweep velocity limitations, and other different physics related issues,…
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For the R&D-grade e-beam writers (even such as modern Raith tools or Crestec) there are still different issues concerning the handling source GDS geometry via pattern generator rasterization algorithms. One of them is that it cannot judge whethe…