r_user_ant
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I've had the same issue, it looks like negative tapers aren't possible currently. I've tried to simulate a lift-off process and it isn't able to do it properly. There might be a way still. I did a planarize to get rid of a top layer.
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The total area was 250um x 250 um and I was trying to export with a 2.5 nm/pixel grid. One fix is to crop the image multiple times and then combine the images into a single file with another piece of software.