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Fracturing a big polygon in smaller shapes

filmartinellifilmartinelli
in Help wanted, Jobs wanted

Hello,
Since my lithography system does not accept large patterns, I need to fracture my big design into smaller shapes that fit within a defined square area. For example, in the picture below, layer 2 contains my pattern that spans a large area, and layer 1 contains 4 tiles that define the regions in which I’d like to divide the pattern:

Here is the desired result:

I was able to achieve this manually by tiling the whole area, then selecting the pattern and each tile individually, and applying the Intersection function. However, since my design involves around 80 different patterns and 196 tiles, I would really like to automate this process.

Does anyone know if there is already a function that performs this operation? If not, could you suggest an approach to implement it automatically?

Thank you!

Comments

  • MatthiasMatthias

    Hi @filmartinelli,

    A simple way is to use a DRC script in "tiled" mode.

    Here is a sample that merges layer 14/0 and produces polygons clipped to 500x500µm tiles. The output is written to layer 1014/0.

    # Use 500x500µm tiles
tiles(500.0)

layer = input(14, 0)
layer.merged.output(1014, 0)

    The tiles are auto-centered, so there is no direct way to place them at a specific position. If that is required, it is possible to create a specific script which does the same thing without invoking DRC.

    Matthias

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