xsection - Implantation on trench cutting through two epitaxial layers

Comments

• Matthias

  March 2018 edited March 2018

  Hi Sophie,

  thanks for reporting this issue. It's actually not obvious what is wrong, but the effect is due to snapping at the boundary of the two materials.

  I have created a ticket for this: https://github.com/klayoutmatthias/xsection/issues/4.

  A quick fix is to monkey patch the XS generator:

  # ----------------------------------------------
  # Workaround for bug #4
  # Insert this snippet into your code at the beginning:
  
  class ::MaskData
  
    def etch(*args)
  
      (xy, z, into, through, on, taper, bias, mode, buried) = parse_grow_etch_args(args, :etch)
      if !into
        raise "'etch' method: requires an 'into' specification"
      end
  
      d = produce_geom(xy, z, into, through, on, taper, bias, mode, buried, :etch)
  
      res = MaterialData.new(d, @xs)
  
      into.each do |i|
        j = LayoutData::new(i.data, @xs)
        i.sub(res)
        j.sub(i)
        @xs.air.add(j)
      end
  
    end
  
  end
  
  # until here
  # ----------------------------------------------
  
  
  # Prepare input layers
  layer_TRENCH = layer("2/0")
  layer_IMPLANT = layer("3/0")
  
  substrate = bulk
  
  # First epitaxial layer
  epi = deposit(0.5)
  
  # Second epitaxial layer
  epi2 = deposit(0.5)
  
  # TRENCH
  # etch substrate on mask with thickness 0.7µm and angle 30°
  mask(layer_TRENCH).etch(0.7, :taper => 30, :into => [substrate, epi, epi2])
  
  # IMPLANT
  # create an implant by growing the mask into the substrate material and both epitaxial layers.
  implant=mask(layer_IMPLANT).grow(0.2, 0.05, :mode => :round, :into => [substrate, epi, epi2])
  
  # finally output all result material to the target layout
  output("1/0", substrate)
  output("2/0", epi)
  output("3/0", epi2)
  output("6/0", implant)
  

  Let me know whether this works for you. I can transfer this patch into the production code.

  Kind regards,

  Matthias
• Sophie

  March 2018 edited November -1

  Hi Matthias,
  
  Thank you for your quick answer and your help.
  The monkey patch works perfectly.
  
  Regards,
  Sophie