Yeah, many challenges there for sure. might be an extension but not replacement to current OASIS.
Maybe just an intermediate format used to shrink the file size.
In this website they had this survey,
showing the current adoption and future predi…
Thanks Matthias for the info and comments,
I see, it definitely would need massive efforts like from GDS to OASIS, or maybe even not practical.
The AutoCAD area do utilize much of Bezier and B-spline curves to represent objects. Just wondering if …
https://semiengineering.com/the-quest-for-curvilinear-photomasks/
https://www.semanticscholar.org/paper/File-formats-for-curvilinear-multi-beam-writing-of-Zillner-Moqanaki/0678e866e9b2f916b265e5491a0fff16d6f9e3e6
This paper abstract:
The semiconduc…