Hi Mathias,
the process is a subtractive on and based on a epitaxial layer stack. I attached a cleaner GDS with layer desc below.
* layer 3/0 is an isolation implant so the area outside the device sees a He+ implant damaging all the conductive lay…
Hi Matthias,
attached is the GDS txt file of a single 3 terminal device. Let me know if you need further explanation of layers. A sample of a texted approach with "S", "D", "G" might be a good start for me to understa…