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tbenz

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tbenz
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  • This is our current chip before filling: https://iis-people.ee.ethz.ch/~tbenz/hati/hati_chip_sealring.gds.gz And after M1-M5 filling with the following script: https://iis-people.ee.ethz.ch/~tbenz/hati/sg13g2_filler_Metal.lym Resulting in: https://…
    in fill multiorigin and manufacturing grid Comment by tbenz September 2
  • We are currently trying both the auto_origin and multi_origin options. They are giving very good fill density results, yet parts of the pattern are off-grid. Most of them are off by 2nm. We are using KLayout 0.30.2 with IHP's 130nm open PDK and the …
    in fill multiorigin and manufacturing grid Comment by tbenz August 29
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