xSection: Line of Sight, Negative Angle Etch etc

tnoradam

Hi Matthias,
I managed to get deposit working with line-of-sight, and etch with negative taper, as well as with triangular undercut. I will post this one modified file when I have cleaned it up. I would like to ask for your help to combine line-of-sight with the regular :modes of :round / :octagon etc. We couldn't get that to work. Maybe you know a niftier way.

Also, it would be nice to have a command "RemoveFloating" or something like that. As an example, if nitride is etched out from under an oxide mask, and that oxide mask is narrow, then the oxide mask remains floating in air. In some cases, that is ok (when intentionally suspended in Y somewhere), but in other cases it would be great to have a cleanup command that can remove any [material1, material2, etc] not connected to other materials anymore.

Thanks.
Thomas.

Matthias

Hi Thomas,

I'm afraid that XSection has reached the very limits of what is possible within this simple scheme. The topics you mention IMHO would require some simulation tool based on physical models for diffusion, etch and deposition. The simple polygon-manipulation approach of XSection is good for quick generation of nice pictures, not much more.

Regards,

Matthias

hkl_quint

Hi Thomas,
I like to add a negative angle taper in my cross xsection process flow.
I tried setting a negative value for the taper angle. I also looked at the "mask_data.rb" script to see if I can modify it... around lines 181 and after... but was not successful.
Could you share your method for a negative angle etch you mention above?
I like to have the negative angle plus adding a bias to offset the etch location horizontally.
Thanks
Holger

r_user_ant

I've had the same issue, it looks like negative tapers aren't possible currently. I've tried to simulate a lift-off process and it isn't able to do it properly. There might be a way still. I did a planarize to get rid of a top layer.