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DRC operation to converts weirdly drawn polygons to a physical optical shap

mikamarmikamar
edited May 2023 in Layout

Hi Matthias-

I have a layout with weird shaped via polygons that I'm trying to get a more smooth shape for the 2.5d to draw.
Below is an example. There is external notch on top and internal notch in the bottom:

Is there a DRC expression that can make such polygon to be an ellipse shape as it physically show after photo\litho?

Thanks!

Comments

  • mikamarmikamar
    Polygon example
  • MatthiasMatthias

    No, that would be a lithography simulator. They usually work by digitizing the shape into a grayscale image and applying a transfer function kernel (essentially a low pass filter) before turning the image back into a resist contour.

    DRC is not meant for these type of manipulations.

    Matthias

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