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Hi, Can you help with cross section script of a T-shaped gate and passivate it with another layer.
Regards, Waqar
Hi Waqar,
The script of cross section is highly depents on the layout and the process you are using, blow is a example of forming a passivated T shaped object using two layer of PR, liftoff, and applying a comformed layer.
depth(0) height(25.0) delta(5 * dbu) tg_mk = layer("1/0") subtrate = deposit(1.00) pr_1 = deposit(0.30) pr_2 = deposit(0.50) mask(tg_mk).etch(0.50, 0.20, :into => [pr_2]) mask(tg_mk).etch(0.30, :into => [pr_1]) tg_m = deposit( 0.40, 0.40, :mode => :round) etch( 0.40, :into => [tg_m]) etch( 0.80, 0.80, :into => [pr_2, pr_1]) pas = deposit( 0.01, 0.01, :mode => :round) output("pas", pas) output("tg_m", tg_m) output("pr_1", pr_1) output("pr_2", pr_2) output("subtrate", subtrate)
Dear @RawrRanger , Thanks for your efforts. Highly appreciated.
Comments
Hi Waqar,
The script of cross section is highly depents on the layout and the process you are using, blow is a example of forming a passivated T shaped object using two layer of PR, liftoff, and applying a comformed layer.
Dear @RawrRanger ,
Thanks for your efforts. Highly appreciated.