xsection "grow" profile

Hi,

Is it possible to grow this kind of profile with xsection?

It would be helpful to simlulate seam, e.g. in W CMP process.

Thank you.

Comments

  • Hello,

    You can deposit a layer: deposit(height, lateral, options …), for example:

    deposit(0.20, 0.20, :mode => :round)

    you can define the width in Y (height), the width in X (lateral) and some options like rounding the corners for instance, but that's about it I guess...

    Cheers,

    Tomas

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