Help on Fill Tool "How to put entry on Fill cell margin field"

I am using Klayout 25.9, I want to put in vias with specific pitch. How do I put entry on Fill cell margin field?
I tried (1,0) , my vias are filled inside the polygon without space apart. Please advise


  • Hi,

    In your case, the "v1" cell should contain your via on layer 1/0, and a square on layer 2/0 (boundary layer). The layer 2/0 square defines the via pitch so it should be larger than your via size. The "Fill Cell margin" field can be left blank. It is only needed for enhanced filling.



  • Thanks tomas2004

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