How to create a bubble with xsection script?

TomO

Hy everybody!

I like the xsection addon (creating cross sections out of layout) from klayout very much but come now to a point where I can't get further.

I Need to create a bubble in another layer. For example: Create a deep implantation inside Epitaxy. The Workaround I found out was, to create the implant and after that, create another implant (with Epitaxy) on top of the deep implant and combine it afterwards. Here is the code:

epi = deposit(7.0)
mbody = mask(cmbody).grow(2.1, 1.2, :mode => :round, :through => [fox, gox], :into => [epi])
epiTop = mask(cmbody).grow(1.0, 2.0, :mode => :round, :through => [fox, gox], :into => [mbody])
epiAll = epi.or(epiTop)

Looks not very nice...

Maybe someone has an idea.

Have a nice day!

Tom

Matthias

Hi Tom,

by coincidence I got the same request today by somebody else. Unless you're the same person, this qualifies a new feature :-)

There does not seem to be a simple solution but it should be possible to implement some feature that can provide a deep implant. For example a "buried" option for grow which will make the grow happen in a specified depth below the surface.

Matthias

Matthias

Hi Tom,

I have added a "buried" feature to XSection's grow function. Please see https://sourceforge.net/p/xsectionklayout/wiki/DocGrow/#wzxhzdk64buriedwzxhzdk65-applies-a-conversion-in-a-region-below-the-surface for details.

Let me know what you think.

Matthias

TomO

Hy Matthias!

Worldclass! :o) First tries look perfect to me!

Thanks a lot! :o))

Tom